Patent · US Active

Method for determining a minority carrier diffusion length using surface photo voltage measurements

US7521954B2 · kind B2 · utility

2Cited by

8References

20Claims

0Family size

Assignee

SUMCO CORPORATION · JP

Inventors

Benno Orschel · Saga, JP
Andrzej Buczkowski · Elizabeth, US
Fritz Kirscht · Berlin, DE

Key dates

Filing date	Nov 16, 2006
Grant date	Apr 21, 2009
Priority date	—
Expiry date	Jan 31, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2648
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of determining a diffusion length of a minority carrier in a material which includes applying a first excitation light having a first photon flux to a material, measuring a first surface photo voltage resulting from the application of the first excitation light, applying a second excitation light having a second photon flux to the material, measuring a second surface photo voltage resulting from the application of the second excitation light, applying a third excitation light having a third photon flux, having a predetermined ratio to the first photon flux, to the material, measuring a third surface photo voltage resulting from the application of the third excitation light, determining a diffusion length of a minority carrier in the material based on the measured first, second and third surface photo voltages.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.