Halogen lamp assembly with integrated heat sink
US7522822B2 · kind B2 · utility
8Cited by
18References
20Claims
0Family size
Inventors
Key dates
| Filing date | Jan 6, 2004 |
| Grant date | Apr 21, 2009 |
| Priority date | — |
| Expiry date | Aug 16, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF21V29/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A halogen lamp assembly 20 for a substrate processing chamber 100 has a halogen lamp 22 and a ceramic heat sink monolith 24. The halogen lamp 22 includes a filament 28 and a pair of electrical connectors 30 encapsulated in an envelope 26 having a pinch seal end 34. The ceramic heat sink monolith 24 includes a block 38 and an array of spaced apart posts 40 projecting outwardly from the block 38. The block 38 includes a cavity 42 that has a recessed inner surface 44 shaped to mate with the pinch seal end 34 of the lamp 22 and an opening that allows the electrical connectors 30 of the halogen lamp 22 to pass through.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.