Robert T. Trujillo
6Patents
2h-index
14Co-inventors
44Inventor score
Filing activity: Jan 6, 2004 → Oct 3, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7522822B2 | Halogen lamp assembly with integrated heat sink | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US8562745B2 | Stable wafer-carrier system | Chemistry; Metallurgy | 6 | Active |
| US9441295B2 | Multi-channel gas-delivery system | Emerging Cross-Sectional Technologies | 2 | Active |
| US10273578B2 | Top lamp module for carousel deposition chamber | Chemistry; Metallurgy | 0 | Active |
| US7643146B2 | Methods and apparatus for reducing noise in scatterometry measurements | Performing Operations; Transporting | 0 | Expired |
| US9240513B2 | Dynamic support system for quartz process chamber | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.