Optical component, comprising a material with a predetermined homogeneity of thermal expansion

US7524072B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Timo Laufer · Stuttgart, DE
• Johannes Zellner · Aalen, DE

Key dates

• Filing date: Dec 17, 2004
• Grant date: Apr 28, 2009
• Expiry date: Aug 13, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/065
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

There is provided an optical component. The optical component includes a material having a coefficient of thermal expansion α, where the coefficient of thermal expansion is dependent on location. The following applies to the location-dependent coefficient of thermal expansion:α= α±Δα,