Surface inspection system using laser line illumination with two dimensional imaging
US7525649B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2007 |
| Grant date | Apr 28, 2009 |
| Priority date | — |
| Expiry date | Oct 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95676
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection apparatus and a method are provided which include an illumination system configured to focus a beam of radiation at a non-orthogonal incidence angle to form an illumination line on a surface substantially in a plane of incidence of the focused beam. The apparatus and method further include a collection system configured to image the illumination line onto an array of detectors oriented parallel to the illumination line. The collection system includes an imaging lens for collecting light scattered from the illumination line, a focusing lens for focusing the collected light, and the array of detectors, each configured to detect a corresponding portion of the illumination line. The collection system may be configured to image the illumination line such that the width of the imaged illumination line on the array of detectors is larger than the pixel size of the detectors along the same direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.