Method of making prestructure for MEMS systems
US7527995B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 20, 2005 |
| Grant date | May 5, 2009 |
| Priority date | — |
| Expiry date | Mar 3, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0361
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of making an interferometric modulator element includes forming at least two posts, such as posts formed from spin-on glass, on a substrate. In alternate embodiments, the posts may be formed after certain layers of the modulator element have been deposited on the substrate. An interferometric modulator element includes at least two spin-on glass support posts located on the substrate. In alternate embodiments, the support posts may be located over certain layers of the modulator element, rather than on the substrate. A method of making an interferometric modulator element includes forming a rigid cap over a support post. An interferometric modulator element includes support posts having rigid cap members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.