Attaching components of a carrier head
US7530153B2 · kind B2 · utility
2Cited by
15References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2005 |
| Grant date | May 12, 2009 |
| Priority date | — |
| Expiry date | Aug 15, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/5343
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Techniques for attaching a retaining ring to a carrier head so that the bottom surface of the retaining ring is orthogonal to a central rotational axis of the carrier head are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.