Sputtering power-supply unit
US7531070B2 · kind B2 · utility
8Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2004 |
| Grant date | May 12, 2009 |
| Priority date | — |
| Expiry date | Sep 13, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02M3/33576
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sputtering power-supply unit comprises a voltage generation section which generates a sputtering voltage between a negative electrode output terminal and a positive electrode output terminal, and a circuit section which reduces fluctuation in a sputtering current even if an arc discharge occurs between the negative electrode output terminal and the positive electrode output terminal. Thus, fluctuation in the sputtering current can be reduced even if the arc discharge occurs between the negative electrode output terminal and the positive electrode output terminal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.