Micro sample heating apparatus and method of making the same
US7533564B2 · kind B2 · utility
5Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 2006 |
| Grant date | May 19, 2009 |
| Priority date | — |
| Expiry date | Jul 15, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2300/1827
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A micro sample heating apparatus has a substrate, a micro heating device disposed on a first surface of the substrate, a cavity having a vertical sidewall and corresponding to the micro heating device positioned in a second surface of the substrate, and an isolation structure positioned on the second surface of the substrate. The isolation structure has an opening corresponding to the cavity, and the cavity and the opening form a sample room.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.