Patent · US Expired

Conductor structures including penetrable materials

US7534967B2 · kind B2 · utility

3Cited by
8References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 24, 2004
Grant dateMay 19, 2009
Priority date
Expiry dateMay 16, 2026

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/28562
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Conductor structures include a substrate, a first conducting layer that is selectively passivated from growth of unwanted surface layers by the application of a selective passivation layer, and a second conducting layer that is applied onto the selective passivation layer. The selective passivation layer prevents the combination of unwanted materials with the first conducting layer while allowing the combination of the applied second conducting layer with the first conducting layer. The selective passivation layer is displaced by the second conducting layer and remains as a passivation layer on the exposed surface of the second conducting layer being displaced, thereby protecting the first and second conducting layers from unwanted materials or unwanted surface layers. Methods of fabricating conductor structures are also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.