Annular damascene vertical natural capacitor
US7538006B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 2008 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | May 24, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49204
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for forming a vertical natural capacitor in an integrated circuit is disclosed. In one embodiment, the method includes forming a first set of concentric conductive annular structures in a first metal layer of an integrated circuit. The first set includes a first electrode and a second electrode. The method further includes forming a second set of concentric conductive annular structures in a second metal layer of the integrated circuit, the second set being substantially axially concentric with the first set. The second set also includes a first electrode and a second electrode. The method includes coupling, using conductive vias, the first electrode of the first set to the first electrode of the second set, and the second electrode of the first set to the second electrode of the second set.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.