Inventor · Underhill, VT, US

Thomas L. McDevitt

60Patents
16h-index
65Co-inventors
87Inventor score

Filing activity: Mar 24, 1993 → Dec 27, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US6187680A Method/structure for creating aluminum wirebound pad on copper BEOL Electricity 196 Expired
US5930655A Fluorine barrier layer between conductor and insulator for degradation prevention Emerging Cross-Sectional Technologies 62 Expired
US6310300A Fluorine-free barrier layer between conductor and insulator for degradation prevention Emerging Cross-Sectional Technologies 52 Expired
US6436814B1 Interconnection structure and method for fabricating same Electricity 47 Expired
US5401675A Method of depositing conductors in high aspect ratio apertures using a collimator Electricity 39 Expired
US6066577A Method for providing fluorine barrier layer between conductor and insulator for degradation prevention Emerging Cross-Sectional Technologies 35 Expired
US6214730A Fluorine barrier layer between conductor and insulator for degradation prevention Emerging Cross-Sectional Technologies 34 Expired
US7335577B2 Crack stop for low K dielectrics Electricity 31 Expired
US5494860A Two step annealing process for decreasing contact resistance Emerging Cross-Sectional Technologies 25 Expired
US7015150B2 Exposed pore sealing post patterning Electricity 23 Expired
US8604618B2 Structure and method for reducing vertical crack propagation Electricity 21 Active
US6333559A Method/structure for creating aluminum wirebound pad on copper BEOL Electricity 20 Expired
US8604898B2 Vertical integrated circuit switches, design structure and methods of fabricating same Electricity 20 Active
US7521336B2 Crack stop for low K dielectrics Electricity 19 Active
US6667533B2 Triple damascene fuse Electricity 17 Expired
US5486267A Method for applying photoresist Emerging Cross-Sectional Technologies 16 Expired
US6833720B1 Electrical detection of dicing damage Electricity 13 Expired
US8791778B2 Vertical integrated circuit switches, design structure and methods of fabricating same Electricity 12 Active
US7538006B1 Annular damascene vertical natural capacitor Emerging Cross-Sectional Technologies 11 Active
US6518643B2 Tri-layer dielectric fuse cap for laser deletion Electricity 10 Expired
US7176119B2 Method of fabricating copper damascene and dual damascene interconnect wiring Electricity 9 Expired
US8921975B2 System and method for forming aluminum fuse for compatibility with copper BEOL interconnect scheme Electricity 6 Active
US6653737B2 Interconnection structure and method for fabricating same Electricity 6 Expired
US8106513B2 Copper damascene and dual damascene interconnect wiring Electricity 5 Active
US6504203B2 Method of forming a metal-insulator-metal capacitor for dual damascene interconnect processing and the device so formed Emerging Cross-Sectional Technologies 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.