Interferometer
US7538323B2 · kind B2 · utility
7Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2005 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Sep 17, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides a technique enabling to control fringe spacing s and an interference width W independently of each other, which are important parameters for an interferometer using an electron biprism.In the present invention, two electron biprisms 9u, 9b are used in two stages along the optical axis, and fringe spacing s and an interference width W are controlled independently of each other by controlling a voltage applied to an electrode of each of the electron biprisms. Also Fresnel diffraction can be suppressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.