Monolithic nanoscale actuation
US7538470B2 · kind B2 · utility
4Cited by
6References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 5, 2006 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Jan 30, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
An apparatus including an actuator configured for controllable deflection, and also including a piezoresistive element integral to the actuator and having first and second piezoresistive portions and a plurality of contacts. One of the plurality of contacts is configured to pass a received feedback signal through the first and second piezoresistive portions. Detection of the actuator deflection is indicated by comparison of the feedback signal as detected via at least one of the plurality of contacts that are interposed by at least one of the first and second piezoresistive portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.