Filters employing both acidic polymers and physical-adsorption media

US7540901B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Oleg P. Kishkovich · Greenville, US
• Devon Kinkead · Cumberland, US
• Anatoly Grayfer · Newton, US
• William Goodwin · Medway, US
• David Ruede · Northbridge, US

Key dates

• Filing date: Feb 28, 2006
• Grant date: Jun 2, 2009
• Expiry date: Oct 22, 2027

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B33Y80/00
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.