Forced air cooling of components on a probecard
US7541824B2 · kind B2 · utility
0Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2006 |
| Grant date | Jun 2, 2009 |
| Priority date | — |
| Expiry date | Jun 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C29/56016
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A probe card with an air channel over the active components for cooling the active components on the probe card is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.