Method of fabricating nanodevices
US7544523B2 · kind B2 · utility
13Cited by
10References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2006 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Jun 13, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/857
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of batch fabrication using established photolithographic techniques allowing nanoparticles or nanodevices to be fabricated and mounted into a macroscopic device in a repeatable, reliable manner suitable for large-scale mass production. Nanoparticles can be grown on macroscopic “modules” which can be easily manipulated and shaped to fit standard mounts in various devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.