Shielded probe apparatus for probing semiconductor wafer
US7545157B2 · kind B2 · utility
1Cited by
33References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2007 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Jul 18, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300 C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.