Aligner evaluation system, aligner evaluation method, a computer program product, and a method for manufacturing a semiconductor device
US7546178B2 · kind B2 · utility
6Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2007 |
| Grant date | Jun 9, 2009 |
| Priority date | — |
| Expiry date | Aug 3, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70991
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An aligner evaluation system includes (a) an error calculation module configured to calculate error information on mutual optical system errors among a plurality of aligners; (b) a simulation module configured to simulate device patterns to be delineated by each of the aligners based on the error information; and (c) a evaluation module configured to evaluate whether each of the aligners has appropriate performances for implementing an organization of a product development machine group based on the simulated device pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.