Patent · US Active

Optical imaging device

US7548387B2 · kind B2 · utility

1Cited by

9References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Thorsten Rassel · Wertingen, DE
Erich Merz · Oberkochen, DE
Martin Mahlmann · Heidenheim, DE

Key dates

Filing date	Apr 6, 2006
Grant date	Jun 16, 2009
Priority date	—
Expiry date	Nov 1, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70816
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical imaging device (1a) has at least one optical element (2) which is provided with an outer frame (1), an inner ring (4) in which the optical element (2) is mounted, and a manipulator instrument having at least one actuator. Contactless linkage of the inner ring (4) to the outer frame (1) is provided in at least one degree of freedom by means of a support (5) arranged between the inner ring (4) and the outer frame (1). The manipulator instrument has at least one actuator (8), the setting forces and/or bearing forces of which act contactlessly on the inner ring (4), for mounting and/or positioning and/or manipulating the inner ring (4) relative to the outer frame (1).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.