Inventor · Wertingen, DE

Thorsten Rassel

13Patents
5h-index
28Co-inventors
62Inventor score

Filing activity: Dec 17, 2002 → Apr 27, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US7304717B2 Imaging device in a projection exposure facility Physics 8 Expired
US7710542B2 Imaging device in a projection exposure machine Physics 6 Active
US7486382B2 Imaging device in a projection exposure machine Physics 5 Active
US8885143B2 Projection exposure apparatus for microlithography for the production of semiconductor components Physics 5 Active
US7961294B2 Imaging device in a projection exposure facility Physics 5 Active
US9041910B2 Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator Physics 1 Active
US7548387B2 Optical imaging device Physics 1 Active
US8810934B2 Positioning method for an optical arrangement of a projection illumination system Physics 1 Active
US8854603B2 Gravitation compensation for optical elements in projection exposure apparatuses Physics 1 Active
US8514371B2 Imaging device in a projection exposure facility Physics 0 Active
US9341807B2 Gravitation compensation for optical elements in projection exposure apparatuses Physics 0 Active
US9298101B2 Multi facet mirror of a microlithographic projection exposure apparatus Physics 0 Active
US9513562B2 Projection exposure apparatus for microlithography for the production of semiconductor components Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.