Thorsten Rassel
13Patents
5h-index
28Co-inventors
62Inventor score
Filing activity: Dec 17, 2002 → Apr 27, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7304717B2 | Imaging device in a projection exposure facility | Physics | 8 | Expired |
| US7710542B2 | Imaging device in a projection exposure machine | Physics | 6 | Active |
| US7486382B2 | Imaging device in a projection exposure machine | Physics | 5 | Active |
| US8885143B2 | Projection exposure apparatus for microlithography for the production of semiconductor components | Physics | 5 | Active |
| US7961294B2 | Imaging device in a projection exposure facility | Physics | 5 | Active |
| US9041910B2 | Multi facet mirror of a microlithographic projection exposure apparatus with a tilting actuator | Physics | 1 | Active |
| US7548387B2 | Optical imaging device | Physics | 1 | Active |
| US8810934B2 | Positioning method for an optical arrangement of a projection illumination system | Physics | 1 | Active |
| US8854603B2 | Gravitation compensation for optical elements in projection exposure apparatuses | Physics | 1 | Active |
| US8514371B2 | Imaging device in a projection exposure facility | Physics | 0 | Active |
| US9341807B2 | Gravitation compensation for optical elements in projection exposure apparatuses | Physics | 0 | Active |
| US9298101B2 | Multi facet mirror of a microlithographic projection exposure apparatus | Physics | 0 | Active |
| US9513562B2 | Projection exposure apparatus for microlithography for the production of semiconductor components | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.