Multifunction X-ray analysis system
US7551719B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2005 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Apr 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/20008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.