Isaac Mazor
41Patents
19h-index
36Co-inventors
81Inventor score
Filing activity: Mar 2, 1990 → Sep 28, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5112129A | Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrology | Physics | 194 | Expired |
| US5438413A | Process for measuring overlay misregistration during semiconductor wafer fabrication | Physics | 126 | Expired |
| US6381303B1 | X-ray microanalyzer for thin films | Physics | 121 | Expired |
| US7551719B2 | Multifunction X-ray analysis system | Physics | 96 | Expired |
| US7120228B2 | Combined X-ray reflectometer and diffractometer | Physics | 92 | Expired |
| US6108398A | X-ray microfluorescence analyzer | Physics | 75 | Expired |
| US6512814B2 | X-ray reflectometer | Physics | 62 | Expired |
| US6389102B2 | X-ray array detector | Physics | 62 | Expired |
| US6556652B1 | Measurement of critical dimensions using X-rays | Physics | 58 | Expired |
| US6639968B2 | X-ray reflectometer | Physics | 51 | Expired |
| US7110491B2 | Measurement of critical dimensions using X-ray diffraction in reflection mode | Physics | 40 | Expired |
| US6680996B2 | Dual-wavelength X-ray reflectometry | Physics | 39 | Expired |
| US7483513B2 | Measurement of properties of thin films on sidewalls | Physics | 23 | Active |
| US6453002B1 | Differential measurement of X-ray microfluorescence | Physics | 22 | Expired |
| US7113566B1 | Enhancing resolution of X-ray measurements by sample motion | Physics | 21 | Expired |
| US9551677B2 | Angle calibration for grazing-incidence X-ray fluorescence (GIXRF) | Physics | 21 | Active |
| US7068753B2 | Enhancement of X-ray reflectometry by measurement of diffuse reflections | Physics | 21 | Expired |
| US7481579B2 | Overlay metrology using X-rays | Physics | 19 | Active |
| US6947520B2 | Beam centering and angle calibration for X-ray reflectometry | Physics | 19 | Expired |
| US8243878B2 | High-resolution X-ray diffraction measurement with enhanced sensitivity | Physics | 18 | Active |
| US6351516B1 | Detection of voids in semiconductor wafer processing | Electricity | 18 | Expired |
| US6895071B2 | XRR detector readout processing | Physics | 16 | Expired |
| US5740953A | Method and apparatus for cleaving semiconductor wafers | Emerging Cross-Sectional Technologies | 15 | Expired |
| US7653174B2 | Inspection of small features using X-ray fluorescence | Physics | 14 | Active |
| US7023954B2 | Optical alignment of X-ray microanalyzers | Physics | 14 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.