Apparatus and method for displaying mass flow controller pressure
US7552015B2 · kind B2 · utility
24Cited by
29References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2002 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Aug 25, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.