Adhesive with differential optical properties and its application for substrate processing
US7553386B2 · kind B2 · utility
2Cited by
9References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 22, 2008 |
| Grant date | Jun 30, 2009 |
| Priority date | — |
| Expiry date | May 22, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1105
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An adhesive adapted with particular optical properties, and its use to couple a substrate to a substrate holder during substrate processing are disclosed. After processing the substrate, the optical properties of the adhesive may be exploited to locate and/or remove adhesive residue that may be present on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.