Probe receptacle for mounting a probe for testing semiconductor components, probe holder arm and test apparatus

US7560942B2 · kind B2 · utility

Assignee

• SUSS MicroTec Test Systems GmbH · DE

Inventors

• Hans-Jurgen Fleischer · Großenhain, DE
• Axel Schmidt · Munich, DE
• Stojan Kanev · Sacka, DE
• Axel Becker · Altrip, DE

Key dates

• Filing date: Feb 13, 2007
• Grant date: Jul 14, 2009
• Expiry date: Jun 5, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2874
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

To arrange a probe needle in a reproducible manner, ensure reliable contact-connection of the probe needle and ensure that the probe needle is held securely even at high temperatures or test forces, a probe receptacle is provided for mounting a probe for testing semiconductor components. The probe has a probe needle and an essentially prismatic probe shaft. The probe receptacle comprises a base having a socket opening to receive the prismatic probe shaft, surrounded by a base wall. The base wall comprises at least two base wall segments which can be moved toward one another. A probe holder arm having such a probe receptacle, and test apparatus having at least one probe which has such a probe receptacle are also provided.