Phase shifting interferometry with multiple accumulation
US7564568B2 · kind B2 · utility
10Cited by
10References
35Claims
0Family size
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Key dates
| Filing date | Mar 1, 2007 |
| Grant date | Jul 21, 2009 |
| Priority date | — |
| Expiry date | Mar 1, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2009/0265
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer system is disclosed which is configured to combine measurement light with reference light to form an optical interference pattern, where the interferometer system includes a modulator configured to repetitively introduce a sequence of phase shifts between the measurement and reference light; and a camera system positioned to measure the optical interference pattern, where the camera system is configured to separately accumulate time-integrated images of the optical interference pattern corresponding to the different phase shifts in the sequence during the repetitions of the sequence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.