Method for forming a variable capacitor
US7565725B2 · kind B2 · utility
1Cited by
4References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 30, 2006 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Mar 18, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/0577
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for forming a variable capacitor including a conductive strip covering the inside of a cavity, and a flexible conductive membrane placed above the cavity, the cavity being formed according to the steps of: forming a recess in the substrate; placing a malleable material in the recess; having a stamp bear against the substrate at the level of the recess to give the upper part of the malleable material a desired shape; hardening the malleable material; and removing the stamp.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.