Composition for removing an insulation material and related methods
US7566666B2 · kind B2 · utility
0Cited by
8References
8Claims
0Family size
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Key dates
| Filing date | Aug 8, 2006 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Sep 26, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02079
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A composition for removing an insulation material and related methods of use are disclosed. The composition comprises about 1 to 50 percent by weight of an oxidizing agent, about 0.1 to 35 percent by weight of a fluorine-containing compound, and water. The insulation material comprises at least one of a low-k material and a protection material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.