Thermal transfer sheet for ion source
US7566883B2 · kind B2 · utility
3Cited by
14References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 12, 2007 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Feb 8, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.