Patent · US Active

Scanning probe apparatus with in-situ measurement probe tip cleaning capability

US7569112B2 · kind B2 · utility

0Cited by

1References

1Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Lin Zhou · Acton, US
Dmitriy Shneyder · Hopewell Junction, US

Key dates

Filing date	Mar 16, 2007
Grant date	Aug 4, 2009
Priority date	—
Expiry date	Jan 28, 2028

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB82Y35/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning probe apparatus includes a measurement probe tip and an auxiliary probe tip that is movably positionable with respect to the measurement probe tip. The measurement probe tip and the auxiliary probe tip may be positioned juxtaposed, so that an electrical discharge may be effected between the measurement probe tip and auxiliary probe tip to remove a contaminant from the measurement probe tip. The auxiliary probe tip may be integral with a sample support plate within the scanning probe apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.