Dmitriy Shneyder
12Patents
2h-index
28Co-inventors
46Inventor score
Filing activity: Apr 12, 2005 → Jun 1, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7407554B2 | Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent | Emerging Cross-Sectional Technologies | 5 | Active |
| US7645694B2 | Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent | Emerging Cross-Sectional Technologies | 3 | Active |
| US7535349B2 | Determining root cause for alarm in processing system | Physics | 2 | Active |
| US8299584B2 | Alignment of wafers for 3D integration | Electricity | 2 | Active |
| US7869002B2 | Reducing contamination in immersion lithography | Electricity | 2 | Active |
| US7446859B2 | Apparatus and method for reducing contamination in immersion lithography | Electricity | 2 | Active |
| US8467993B2 | Measurement tool monitoring using fleet measurement precision and tool matching precision analysis | Physics | 1 | Active |
| US7782445B2 | Reducing contamination in immersion lithography | Electricity | 1 | Active |
| US7807335B2 | Immersion lithography contamination gettering layer | Emerging Cross-Sectional Technologies | 1 | Active |
| US7787101B2 | Apparatus and method for reducing contamination in immersion lithography | Physics | 0 | Active |
| US7569112B2 | Scanning probe apparatus with in-situ measurement probe tip cleaning capability | Performing Operations; Transporting | 0 | Active |
| US8347741B2 | Specimen handling apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.