Deflection signal compensation for charged particle beam
US7569841B2 · kind B2 · utility
13Cited by
7References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 2006 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Jun 29, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30483
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.