Real time alarm classification and method of use
US7570174B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2007 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Jan 25, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/0281
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A real time alarm classification system and method of use and, more particularly, to a residual gas analyzer configured to identify specific root causes of an abnormal condition such as, for example, contamination, undesirable process variability and equipment malfunction in wafer processing. The real-time alarm classification system comprises a computer infrastructure operable to: generate top contributors associated with an alarm triggered by sensed abnormal conditions; compare the top contributors to contributors of historic RGA (residual gas analyzer) alarms of known root causes that were generated by a validated model; and provide a probable root cause of the sensed abnormal conditions when a match is found between the top contributors and the contributors associated with the historic RGA alarms of known root causes. A method and computer readable medium is also contemplated to provide the processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.