Michael L. Passow
12Patents
7h-index
30Co-inventors
66Inventor score
Filing activity: Dec 23, 1992 → Jan 7, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5308414A | Method and apparatus for optical emission end point detection in plasma etching processes | Electricity | 58 | Expired |
| US5811357A | Process of etching an oxide layer | Electricity | 37 | Expired |
| US6268226A | Reactive ion etch loading measurement technique | Electricity | 23 | Expired |
| US6207353A | Resist formulation which minimizes blistering during etching | Electricity | 14 | Expired |
| US6296717A | Regeneration of chemical mechanical polishing pads in-situ | Electricity | 9 | Expired |
| US5534066A | Fluid delivery apparatus having an infrared feedline sensor | Chemistry; Metallurgy | 8 | Expired |
| US6102776A | Apparatus and method for controlling polishing of integrated circuit substrates | Performing Operations; Transporting | 7 | Expired |
| US5492718A | Fluid delivery apparatus and method having an infrared feedline sensor | Chemistry; Metallurgy | 5 | Expired |
| US9395219B1 | Ring-based monitoring of sensor mesh networks | Electricity | 4 | Active |
| US7570174B2 | Real time alarm classification and method of use | Physics | 1 | Active |
| US9575554B1 | Dynamic time sliced sensor sampling for reduced power consumption | Emerging Cross-Sectional Technologies | 1 | Active |
| US10120103B2 | Intelligent/autonomous thermocline mapping and monitoring for marine and freshwater applications | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.