Inventor · West Hurley, NY, US

Michael L. Passow

12Patents
7h-index
30Co-inventors
66Inventor score

Filing activity: Dec 23, 1992 → Jan 7, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5308414A Method and apparatus for optical emission end point detection in plasma etching processes Electricity 58 Expired
US5811357A Process of etching an oxide layer Electricity 37 Expired
US6268226A Reactive ion etch loading measurement technique Electricity 23 Expired
US6207353A Resist formulation which minimizes blistering during etching Electricity 14 Expired
US6296717A Regeneration of chemical mechanical polishing pads in-situ Electricity 9 Expired
US5534066A Fluid delivery apparatus having an infrared feedline sensor Chemistry; Metallurgy 8 Expired
US6102776A Apparatus and method for controlling polishing of integrated circuit substrates Performing Operations; Transporting 7 Expired
US5492718A Fluid delivery apparatus and method having an infrared feedline sensor Chemistry; Metallurgy 5 Expired
US9395219B1 Ring-based monitoring of sensor mesh networks Electricity 4 Active
US7570174B2 Real time alarm classification and method of use Physics 1 Active
US9575554B1 Dynamic time sliced sensor sampling for reduced power consumption Emerging Cross-Sectional Technologies 1 Active
US10120103B2 Intelligent/autonomous thermocline mapping and monitoring for marine and freshwater applications Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.