System, method, and computer-readable medium for performing data preparation for a mask design
US7571421B2 · kind B2 · utility
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3References
17Claims
0Family size
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Key dates
| Filing date | Apr 23, 2007 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Sep 7, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method, computer-readable medium, and system for performing data preparation are provided. An integrated circuit design is received, and a plurality of pre-optical proximity correction processes are invoked such that the plurality of pre-optical proximity correction processes are performed in parallel. An optical proximity correction process is invoked in response to a determination that each of the plurality of pre-optical proximity correction processes have completed. A post-optical proximity correction process is invoked in response to a determination that the optical proximity correction process has completed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.