Stress measuring method and system
US7571653B2 · kind B2 · utility
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9References
18Claims
0Family size
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Key dates
| Filing date | Aug 22, 2006 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Aug 27, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/0047
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An energy beam is applied to an evaluation region of a sample, a phase distribution image of the energy beam transmitted to the sample in the evaluation region is obtained, and the obtained phase distribution image is analyzed, whereby a stress distribution in the evaluation region is measured. This measuring method measures a stress, based on a phase distribution image, whereby the stress can be measured irrespectively of a crystalline structure of an evaluation sample. A phase distribution image is used, whereby two-dimensional distribution images of the stress, density and refractive index can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.