Tightness test for MEMS or for small encapsulated components
US7572053B2 · kind B2 · utility
4Cited by
5References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2005 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Aug 7, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/3281
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tightness testing method for a MEMS or small encapsulated component, the MEMS or small component being housed in a cavity of a carrier. The cavity being sealed and containing a gas having a different density to the density it would have if subjected to the pressure of the medium outside the cavity. The method measures the density of the gas contained in the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.