Substrate alignment system
US7572092B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2002 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Jan 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A system for aligning an end effector with a substrate in a substrate transport apparatus. The system comprises a first sensor connected to the end effector and a controller for moving the substrate transport apparatus. The sensor has a sensing path pointed in an outward direction. The sensing path does not intersect the substrate when the substrate is located on the end effector. The controller for moving the substrate transport apparatus moves the substrate transport apparatus, based at least partially upon input from the sensor, to position the end effector at a predetermined position relative to the substrate to pick up the substrate onto the end effector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.