Pumping apparatus using thermal transpiration micropumps
US7572110B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 2004 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Mar 12, 2026 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B19/006
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Pumping apparatus of the invention using thermal transpiration micropumps comprises a plurality of individual thermal transpiration micropumps distributed over a substrate (5) as a plurality of rows (A, B, C, . . . , D) each made up of a plurality of micropumps (1, 6, . . . , 7, 8, 9), thereby building up a plurality of columns (a, b, . . . , c, d). Respective heater elements (4) in each of the thermal transpiration micropumps are controlled by suitably controlling a row control conductor (10A) and a column control conductor (11a). This greatly simplifies multiplexed control of a large number of individual micropumps, thus enabling pumping capacity to be adapted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.