Contact magnetic transfer template
US7572499B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2005 |
| Grant date | Aug 11, 2009 |
| Priority date | — |
| Expiry date | Apr 29, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.