Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof

US7573634B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Uwe Schmidt · Falkenberg, DE
• Thilo Sandner · Dresden, DE
• Harald Schenk · Dresden, DE
• Alexandre Gatto · Jena, DE
• Minghong Yang · Berlin, DE
• Jörg Heber · Erfurt, DE
• Norbert Kaiser · Markt Taschendorf, DE

Key dates

• Filing date: Jun 27, 2005
• Grant date: Aug 11, 2009
• Expiry date: Jan 31, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/08
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.