Patent · US Active

Probe holder for a probe for testing semiconductor components

US7579849B2 · kind B2 · utility

4Cited by

6References

11Claims

0Family size

Assignee

SUSS MicroTec Test Systems GmbH · DE

Inventors

Jorg Kiesewetter · Thiendorf, DE
Stefan Kreissig · Drebach, DE
Stojan Kanev · Sacka, DE

Key dates

Filing date	Feb 13, 2007
Grant date	Aug 25, 2009
Priority date	—
Expiry date	Feb 13, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/0675
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force, includes a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the probe holder to the carrier device. The holder arm and the fastening arm are connected to one another by an articulated joint, whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented by increasing the radius of the yielding movement of the probe needle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.