Probe station and method for measurements of semiconductor devices under defined atmosphere

US7579854B2 · kind B2 · utility

Assignee

• SUSS MicroTec Test Systems GmbH · DE

Inventors

• Jorg Kiesewetter · Thiendorf, DE
• Stefan Kreissig · Drebach, DE
• Stojan Kanev · Sacka, DE
• Claus Dietrich · Sacka, DE

Key dates

• Filing date: Nov 21, 2007
• Grant date: Aug 25, 2009
• Expiry date: Nov 21, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2881
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A prober is described that is suitable for testing of semiconductor substrates under atmospheric conditions that deviate from ambient conditions. The prober includes a chuck for mounting of a semiconductor substrate and a probe holder for mounting of test tips for electrical contacting of the semiconductor substrate. The semiconductor substrate and test tips are arranged within a housing sealed relative to the surrounding atmosphere. The housing comprises two housing parts joined with a seal. The seal can be inflated with two different pressures and is less deformable at higher pressure. For testing of the semiconductor substrate, coarse positioning of the semiconductor substrate relative to the test tips occurs under atmospheric conditions and then fine positioning with the sealed housing and deformable seal before the lower deformability of the seal is produced at higher pressure in the seal and the semiconductor substrate is contacted by the test tips and tested.