Patent · US Active

Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component

US7580207B2 · kind B2 · utility

3Cited by

8References

10Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventor

Frank Melzer · Utzmemmingen, DE

Key dates

Filing date	May 12, 2006
Grant date	Aug 25, 2009
Priority date	—
Expiry date	Jun 20, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70966
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical apparatus comprises an optical component having at least one optical surface and a first optical axis, a socket in which said optical component is mounted, first manipulators arranged to exert forces approximately parallel to the optical axis of the optical component for varying stresses in the optical component, the forces having a strength such that stress birefringence is induced in the component.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.