System and method for calibrating a spatial light modulator
US7580559B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2004 |
| Grant date | Aug 25, 2009 |
| Priority date | — |
| Expiry date | Mar 23, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/58
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and system as used to calibrate a reflective SLM. The system can include the SLM having an array of pixels and a projection optical system resolving individual pixels and having an apodized pupil. During a calibration operation, the pixels of the SLM receive varying voltage values to move them through various angles. Light reflecting from the pixels during these movements forms individual images for each pixel at each angle. The light passes through the apodized pupil and is received on one or more sections of a detector. The apodization pattern is selected so that individual pixels remain well resolved with strong sensitivity to the pixel mirror tilt. The light intensity received for each pixel at each angle is correlated to the voltage value received at the pixel to tilt the pixel to that angle producing a result signal used by a control device to calibrate the SLM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.