Method of manufacturing an optical component

US7581305B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Bernhard Geuppert · Lauchheim, DE
• Jens Kugler · Heubach, DE
• Thomas Ittner · Aalen, DE
• Bernd Geh · Scottsdale, US
• Rolf Freimann · Aalen, DE
• Guenther Seitz · Löwenstein, DE
• Bernhard Fellner · Aalen, DE
• Bernd Doerband · Aalen, DE
• Stefan Schulte · Marburg, DE

Key dates

• Filing date: Apr 12, 2004
• Grant date: Sep 1, 2009
• Expiry date: Apr 17, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49171
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of manufacturing an optical component comprising a substrate and a mounting frame with plural contact portions disposed at predetermined distances from each other is provided. The method comprises providing a measuring frame separate from the mounting frame for mounting the substrate, which measuring frame comprises a number of contact portions equal to a number of the contact portions of the mounting frame, wherein respective distances between the contact portions of the measuring frame are substantially equal to the corresponding distances between those of the mounting frame, measuring a shape of the optical surface of the substrate, while the substrate is mounted on the measuring frame, and mounting the substrate on the mounting frame such that the contact portions of the mounting frame are attached to the substrate at regions which are substantially the same as contact regions at which the substrate was attached to the measuring frame.