Sample introduction and transfer system and method
US7581916B2 · kind B2 · utility
6Cited by
18References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 2006 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Feb 2, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/185
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method and system that provides a processing chamber associated with a load lock chamber. A sample receiving stage coupled to a sample positioning apparatus is configured to move between an introduction position and a processing analysis position within the process chamber. The sample receiving stage is used to result in a sealed barrier between the process chamber and the associated load lock chamber when in the introduction position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.