Method and system for controlling a velocity field of a supercritical fluid in a processing system
US7582181B2 · kind B2 · utility
11Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2004 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Jan 11, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67028
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and system for controlling a velocity field in a processing system is described. In an exemplary embodiment described, the system includes a multi-outlet exhaust manifold having three or more outlets coupled to the processing system adjacent a surface of a substrate to be process. The three or more outlets are located adjacent the substrate in order to provide for a uniform flow of fluid above the surface of the substrate. Additionally, the flow of fluid through the three or more outlets is cyclically and sequentially alternated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.