Mounting and adhesive layer for semiconductor components
US7582909B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2006 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Jan 27, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/857
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An assembly and adhesive layer for semiconductor components is arranged between a silicon support (submount) and an electronic functional element for the formation of an electrically-conducting connection between the silicon support and the functional element. The assembly and adhesive layer are arranged on the support. The assembly and adhesive layer are made from a Ti/TiN layer (6), applied to an aluminum contact surface (5) of the silicon support (1), by means of a deposition method. The aluminum contact surface (5) is located on a landing pad (2) on the silicon support (1).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.